An E-/D-mode pHEMT Process for High Performance Switch and Amplifier Components Utilizing Multi-level High Density Interconnects
A robust pseudomorphic high electron mobility transistor (pHEMT) process offering enhancement- and depletion-mode GaAs/AlGaAs/InGaAs transistors possessing 0.5-μm gate lengths with a double recess layout is presented and discussed. The E-mode devi...
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