This article presents a methodology for modeling the resistance of MIM capacitors, directly from measured S-parameters, using an ultra-low impedance measurement known as the “S21-shunt” technique. It leverages from the work previously introd...
Metal-insulator-metal (MIM) capacitors, (MIM caps) have played a vital role in the design of a wide variety of MMIC circuits, particularly where low loss/high-Q is a critical design requirement. Because of their ease of fabrication, they can be found in the design kits of both silicon and compound semiconductor...
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