Planar Monolithics Industries features model PS-90-8018 option 812, HS15NS, a high speed 0 to 180 degree, miniature, bi-phase modulator/phase shifter with TTL control logic (ECL logic available).
This high speed model has 15 ns delay on/off and operates between 8 to 12 GHz. Other frequency ranges are available to meet other requirements (for example, 6012 for 6 to 12 GHz or 2040 for 2 to 4 GHz).