Fei Zhang, Lina Shi and Chengfang Li, Wuhan University

CPW Transmission Insertion Loss on Si and SOI Substrates

The transmission loss properties of coplanar waveguide (CPW), built on bulk silicon and low and high resistivity silicon-on-insulator (SOI) substrates, are investigated systematically in this article. The experimental results show that the insertion lo...

November 1, 2005

0 Comments

Coplanar waveguides are widely used in MMICs as interconnects and matching networks. Designing low loss, multifunctional and highly integrable transmission lines is a key factor in obtaining high performance from MMICs in silicon technology. 1 Nevertheless, the low resistivity of a standard silicon substrate deteriorates the performance of on-chip...

ARTICLES